Exposure equipment having auxiliary photo mask and exposure...

Details Exposure equipment having auxiliary photo mask and exposure... Exposure equipment having auxiliary photo mask and exposure...

2011-06-07

2011-06-07

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Plural

C355S053000, C355S067000, C355S075000, C355S077000

Reexamination Certificate

active

07956983

ABSTRACT:
Example embodiments of the present invention may provide exposure equipment having an auxiliary photo mask. The exposure equipment may include a light source and a first photo mask spaced apart from the light source by a desired distance. A second photo mask may include a third region and a fourth region. An exposure method using the exposure equipment also may be provided.

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