Exposure device and method of fabricating liquid crystal...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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Details

C430S321000, C430S396000, C355S053000, C355S076000

Reexamination Certificate

active

06921628

ABSTRACT:
An exposure device includes a light irradiator for irradiating light, a mask having a pattern to be formed on a substrate, the mask having a size larger than at least two display panel areas positioned on the substrate, and at least two vacuum pads positioned along sides of the mask for affixing the mask over the substrate.

REFERENCES:
patent: 2001/0009455 (2001-07-01), Nishimura et al.

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