Exposure apparatus, method of controlling same, and method...

Details Exposure apparatus, method of controlling same, and method... Exposure apparatus, method of controlling same, and method...

2006-07-04

2006-07-04

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C355S077000

Reexamination Certificate

active

07072027

ABSTRACT:
A scanning exposure apparatus includes a projection optical system which projects a pattern formed on a mask onto an object, a stage which holds an object and moves in a direction perpendicular to an optical axis of the projection optical system, a measurement system which measures a position of a surface of the object in a direction of the optical axis in response to a reset signal, and a generation system which generates the reset signal when the stage arrives at each predetermined position in the direction perpendicular to the optical axis.

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Yamada, et al (JP 10-047915)-w/ computer translation.

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