Exposure apparatus having interferometer and device...

Details Exposure apparatus having interferometer and device... Exposure apparatus having interferometer and device...

2005-10-06

2008-08-26

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S055000

Reexamination Certificate

active

07417712

ABSTRACT:
Provided is an exposure apparatus including a projection optical system for projecting an exposure pattern onto an object to be exposed, a measurement device for measuring an optical performance of the projection optical system by guiding light to the projection optical system through a measurement pattern to detect interference fringes formed by the light emitted from the projection optical system, and an adjustment portion for adjusting a numerical aperture of the light that illuminates the measurement pattern, in which the adjustment portion adjusts the numerical aperture so that the visibility of the interference fringes V, which is defined as V=(Imax−Imin)/(Imax+Imin), is equal to or more than 0.3, where Imaxrepresents the maximum amount of light of the interference fringes, and Iminrepresents the minimum amount of light of the interference fringes, when the measurement device measures an optical performance of the projection optical system.

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