Optical: systems and elements – Holographic system or element – Copying by holographic means
Patent
1995-06-05
1996-06-18
Lerner, Martin
Optical: systems and elements
Holographic system or element
Copying by holographic means
359 30, 359 35, G03H 104, G03H 120
Patent
active
055283900
ABSTRACT:
An exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques. The apparatus comprises support means for holding a hologram recording plate at a predetermined position both during recording operation and reconstructing operation, a first illuminating optical system for introducing a light beam from a coherent light source to a mask and irradiating a subject beam produced from the mask into the recording plate, a second illuminating optical system for irradiating the light beam from the coherent light source as a reference beam into the recording plate, a carrier apparatus for disposing during reconstructing operation a substrate at the position of the mask in place of the mask, a third illuminating optical system for irradiating a conjugate beam with the reference beam into the recording plate, in which a hologram has been formed by recording operation, to form an image of the hologram on the photo-sensitive surface of the substrate, and a controller for selectively controlling the first, second and third illuminating optical systems to put an at least selected one of them into an operative condition so as to irradiate a fixing light beam into the recording plate in order to fix the hologram.
REFERENCES:
patent: 4857425 (1989-08-01), Phillips
patent: 5151799 (1992-09-01), Ansley
patent: 5216527 (1993-06-01), Sharnoff et al.
Karl A. Stetson, GCA Corporation, Bedford, Massachusetts, entitled "Holography With Total Internally Reflected Light" vol. 11, No. 7, Applied Physics Letters, Oct., 1967.
Jack Feinberg, Dept. of Physics, University of Southern California, Los Angeles, California, entitled "Self Pumped, Continuous-Wave Conjugator Using Internal Reflection", vol. 7, No. 10, Optics Letters, Oct., 1982.
Ebi Masami
Genma Takashi
Goto Akihiro
Ichihara Yutaka
Magome Nobutaka
Lerner Martin
Meller Michael N.
Nikon Corporation
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