Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-03-08
2005-03-08
Niebling, John (Department: 2812)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
06864953
ABSTRACT:
An exposure apparatus for performing exposure of patterns of a reticle onto a substrate includes a first housing covering an optics space containing members of an optical system of an optical path of exposing light, a second housing covering a drive space containing driving members, which adjoins the optics space, members transparent to exposing light provided at boundaries of the adjacent first and second housings, a gas supplier which supplies the interior of the first and second housings with a purging gas, pressure sensors which sense pressures inside respective ones of the first and second housings, and a control unit which controls the gas supplier on the basis of outputs from the pressure sensors in such a manner that pressures within the respective first and second housings will attain respective ones of predetermined pressures.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Niebling John
Stevenson Andre′
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