Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1996-07-05
1999-04-13
Moses, R. L.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 30, 355 53, 250238, G03B 2774, G03B 2780, G03B 2742, H01J 724
Patent
active
058943412
ABSTRACT:
A reticle and a wafer are relatively scanned in a scanning exposure type of projection exposure apparatus so that a pattern on the reticle is transferred onto the wafer by exposure. Heat exchangers which has the Peltier device are provided on a side surface of an integrator sensor which measures the quantity of exposure to control temperature of a photosensitive surface of the integrator sensor. In a side of heat irradiation surface of the heat exchangers, cooling water is circulated so that the heat exchangers are cooled. Saturation temperature at which temperature of the photosensitive surface is saturated when an illumination beam is irradiated to the photosensitive surface is determined and then the quantity of light irradiated to the photosensitive surface is measured with the temperature of the photosensitive surface being maintained at the saturation temperature. Based on the relation determined in advance between temperature of the photosensitive surface and the sensitivity of the integrator sensor at the saturation temperature, values of the quantity of light measured are corrected and then intensity of a light source is controlled by a main control system based on the corrected quantity of light.
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Nishi Kenji
Tsuji Toshihiko
Moses R. L.
Nikon Corporation
Virmani Shival
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