Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1986-04-28
1988-05-31
Hix, L. T.
Photocopying
Projection printing and copying cameras
Step and repeat
356400, G03B 2742, G03B 2753
Patent
active
047484772
ABSTRACT:
An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The exposure apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member. Also, the exposure apparatus includes a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging optical system and a stage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. The stage is mounted on the carriage, and the movement of the carriage is guided by linear air-bearings. The apparatus is arranged such that inclination of the carriage relative to the mirror imaging system to be caused by the movement of the stage is corrected by controlling the amount of air supply to the linear air-bearings, whereby occurrence of shift between the images to be transferred onto the plate-like member is prevented regardless of the change in position of the stage relative to the carriage. In another aspect, the amount of movement of the stage is corrected in accordance the amount of image shift which otherwise may be caused, whereby occurrence of such image shift is prevented.
REFERENCES:
patent: 4370054 (1983-01-01), Isohata et al.
patent: 4496239 (1985-01-01), Isohata et al.
Isohata Junji
Matsushita Koichi
Miyazaki Makoto
Ozawa Kunitaka
Yamamoto Hironori
Canon Kabushiki Kaisha
Hix L. T,.
Rutledge D.
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