Exposure apparatus

Details Exposure apparatus Exposure apparatus

1986-04-22

1987-06-30

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

046766308

ABSTRACT:
An exposure apparatus for exposing a plate-like member to a pattern with radiation in a step-and-repeat manner thereby to transfer images of the pattern onto different regions on a surface of the plate-like member. The apparatus includes an X-Y stage for moving the plate-like member in X and Y directions, a .theta.-stage for moving the plate-like member in a .theta. (rotational) direction relative to the X-Y stage, and laser interferometers for measuring an amount of movement of the plate-like member, by the X-Y stage, in each of the X and Y directions by use of a mirror mounted on the .theta.-stage. Placement of the mirror on the .theta.-stage allows correction of yawing if it occurs during movement of the plate-like member by X-Y stage. Also, deviation of the plate-like member in the Y direction if it occurs during movement of the plate-like member by the X-Y stage in the X direction, is detected by the laser interferometers. This allows detection of a positional error of the mirror in the .theta. direction and allows correction of the .theta.-error by the .theta.-stage.

REFERENCES:
patent: 4362385 (1982-12-01), Lobach
patent: 4370054 (1983-01-01), Isohata et al.
patent: 4425037 (1984-01-01), Hershel et al.

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