Expert knowledge methods and systems for data analysis

Details Expert knowledge methods and systems for data analysis Expert knowledge methods and systems for data analysis

2007-11-13

2007-11-13

Ramos-Feliciano, Eliseo (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Measured signal processing

C703S014000

Reexamination Certificate

active

10327210

ABSTRACT:
A method for adjusting a data set defining a set of process runs, each process run having a set of data corresponding to a set of variables for a wafer processing operation is provided. A model derived from a data set is received. A new data set corresponding to one process run is received. The new data set is projected to the model. An outlier data point produced as a result of the projecting is identified. A variable corresponding to the one outlier data point is identified, the identified variable exhibiting a high contribution. A value for the variable from the new data set is identified. Whether the value for the variable is unimportant is determined. A normalized matrix of data is created, using random data and the variable that was determined to be unimportant from each of the new data set and the data set. The data set is updated with the normalized matrix of data.

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