Fluid handling – Systems – Multi-way valve unit
Reexamination Certificate
2006-06-27
2010-11-02
Lee, Kevin L (Department: 3753)
Fluid handling
Systems
Multi-way valve unit
C137S081100, C137S240000, C137S487500, C137S596160
Reexamination Certificate
active
07823604
ABSTRACT:
A pressure control system is disclosed. The control system in one embodiment includes a main body comprising a pilot chamber wherein an intake port and a discharge port are formed, and a spool comprising an upper slide and a lower slide. The spool in this embodiment is attached by a spring to the upper part of the main body. The exhaust apparatus pressure control system includes an absolute pressure sensor for detecting the pressure in the intake port and a differential pressure sensor for detecting the difference between the pressure in the intake port and atmospheric pressure; a control valve for supplying a pressure regulating gas to the pilot chamber; and a control circuit for sending switching signals to the absolute pressure sensor and the differential pressure sensor, and driving the control valve based on the output from the absolute pressure sensor or differential pressure sensor.
REFERENCES:
patent: 5000221 (1991-03-01), Palmer
patent: 6073644 (2000-06-01), Friedmann et al.
patent: 6237635 (2001-05-01), Nambu
patent: 2004/0007186 (2004-01-01), Saito
patent: 08055769 (1996-02-01), None
patent: 2001-005536 (2001-01-01), None
International Searching Authority, International Preliminary Report on Patentability, May 10, 2007.
International Searching Authority, International Search Report, May 10, 2007.
Japanese Patent Office, English Translation of Patent Abstract for JP08055769A, Feb. 27, 1996.
Advanced Energy Industries Inc.
Lee Kevin L
Neugeboren O'Dowd PC
O'Dowd Sean R.
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