Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2005-01-07
2008-10-07
Chen, Bret (Department: 1792)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C204S193000, C427S255600, C427S008000
Reexamination Certificate
active
07431807
ABSTRACT:
A method for evaporating a solid organic material by sublimation using an infrared guiding heater which minimizes temperature gradients in the bulk of the organic target. The bulk is heated to a temperature below the sublimation temperature of the target. A localized area of the target is sublimated by the infrared guiding heater while regulating the temperature of the bulk. The vapor is then deposited over, and condensed on, a substrate to form a solid organic layer.
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< http://www.kagaku.com/thermo/tech.html> website.
< http://www.kagaku.com/thermo/emenu—top.html >, website, Major Products and product list.
Chen Bret
Kenyon & Kenyon LLP
Universal Display Corporation
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