Evaporation arc stabilization

Details Evaporation arc stabilization Evaporation arc stabilization

1983-05-09

1984-02-07

Andrews, R. L.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204164, 204298, 118 501, 118723, 427 37, 427 47, C23C 1500

Patent

active

044301847

ABSTRACT:
Apparatus and method for evaporation arc stabilization including a target having a surface of material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring contacting and surrounding the target surface, the ring being composed of a material such as boron nitride having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material to thereby confine the cathode spot to the target surface. Further, the secondary emission ratio of the confinement ring is preferably less than that of the target.

REFERENCES:
patent: 3181968 (1965-05-01), Mandorf, Jr.
patent: 3625848 (1971-12-01), Snaper
patent: 3793179 (1974-02-01), Sabley et al.
patent: 3836451 (1974-09-01), Snaper
patent: 4197175 (1980-04-01), Moll et al.

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