Optics: measuring and testing – Of light reflection
Reexamination Certificate
2008-05-27
2008-05-27
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Of light reflection
C356S635000, C356S237100
Reexamination Certificate
active
07379185
ABSTRACT:
A patterned dielectric layer is evaluated by measuring reflectance of a region which has openings. A heating beam may be chosen for having reflectance from an underlying conductive layer that is several times greater than absorptance, to provide a heightened sensitivity to presence of residue and/or changes in dimension of the openings. Reflectance may be measured by illuminating the region with a heating beam modulated at a preset frequency, and measuring power of a probe beam that reflects from the region at the preset frequency. Openings of many embodiments have sub-wavelength dimensions (i.e. smaller than the wavelength of the heating beam). The underlying conductive layer may be patterned into links of length smaller than the diameter of heating beam, so that the links float to a temperature higher than a corresponding temperature attained by a continuous trace that transfers heat away from the illuminated region by conduction.
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Borden Peter G.
Genio Edgar
Li Jiping
Applied Materials Inc.
Lauchman Layla G.
Suryadevara Omkar
Valentin II Juan D
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