Evaluation of chamber components having textured coatings

Details Evaluation of chamber components having textured coatings Evaluation of chamber components having textured coatings

2006-04-11

2006-04-11

Padgett, Marianne (Department: 1762)

Coating processes

Measuring, testing, or indicating

C427S450000, C427S452000, C427S453000, C427S456000, C219S121470, C118S7230AN, C117S085000

Reexamination Certificate

active

07026009

ABSTRACT:
A component for a substrate processing chamber comprises a structure having a textured coating with surface grains. The component is evaluated by directing a beam of electrons onto the textured coating of the component to cause at least some of the electrons to be backscattered. The backscattered electrons are detected and a signal image is generated. The component is selected when the signal image exhibits surface grains sized from about 0.1 to about 5 micron. In one version, the component is also selected when the grains are substantially flower shaped.

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