Evaluation device for electron-optical images

Details Evaluation device for electron-optical images Evaluation device for electron-optical images

1984-02-08

1985-06-11

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

353 40, 353 42, 364520, H01J 3726

Patent

active

045230943

ABSTRACT:
The invention contemplates an electron microscope having provision for semi-automatic evaluation of the electron-optical image of the microscope, by superposing a light-optical image on the electron-optical image. For this purpose, an image plane (14) near the microscope column is imaged via two deflection mirrors (23, 25) and by an objective (24) onto the output-image fluorescent screen. A marking device having a light spot or an illuminated measurement diaphragm or the cursor of a digitizer equipped with a light spot is movable in the image plane (14).

REFERENCES:
patent: 2233286 (1941-02-01), Marton
patent: 3614410 (1971-10-01), Bailey et al.
patent: 3915568 (1975-10-01), Yamada et al.
patent: 4206349 (1980-06-01), Kamimura

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