Thermal measuring and testing – Leak or flaw detection – With heating or cooling of specimen for test
Patent
1984-05-21
1987-07-14
Yasich, Daniel M.
Thermal measuring and testing
Leak or flaw detection
With heating or cooling of specimen for test
356445, 374 7, 374 57, G01N 2141, G01N 2500
Patent
active
046799460
ABSTRACT:
The subject invention discloses a method and apparatus for evaluating both the thickness and compositional variables in a layered or thin film sample. Two independent detection systems are provided for measuring thermal waves generated in a sample by a periodic, localized heating. One detection system is of the type that generates output signals that are primarily a function of the surface temperature of the sample. The other detection system generates signals that are primarily a function of the integral of the temperature beneath the sample surface. The two independent thermal wave measurements permit analysis of both thickness and compositional variables. An apparatus is disclosed wherein both detection systems can be implemented efficiently within one apparatus.
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Opsal Jon
Rosencwaig Allan
Therma-Wave, Inc.
Yasich Daniel M.
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