Coating apparatus – Gas or vapor deposition – With treating means
Patent
1981-10-05
1987-07-28
Cline, William R.
Coating apparatus
Gas or vapor deposition
With treating means
118728, 165 46, 165185, 165 804, 250429, 2504922, F28F 2300
Patent
active
046825665
ABSTRACT:
The use, for heat transfer in evacuable or other equipment, of a thermally conductive fluid, confined by a flexible diaphragm, for heat transfer across the diaphragm between the fluid and a component placed in thermal contact with the diaphragm.
REFERENCES:
patent: 2595328 (1952-05-01), Bowen
patent: 2799793 (1957-07-01), DeCain
patent: 2967984 (1961-01-01), Jamison
patent: 3294661 (1966-12-01), Maissel
patent: 3586102 (1971-06-01), Gilles
patent: 3764511 (1973-10-01), Glick et al.
patent: 3807188 (1974-04-01), Lagodmos
patent: 3965973 (1976-06-01), Thettu et al.
patent: 4092697 (1978-05-01), Spaight
patent: 4155402 (1979-05-01), Just
patent: 4261762 (1981-04-01), King
Kleinfelder et al, Liquid-Filled Bellows Heat Sink, IBM Tech. Disc. Bulletin, vol. 21, No. 10, Mar. 1979, pp. 4125-4126.
Applied Materials Inc.
Cline William R.
Hinds William R.
LandOfFree
Evacuated equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Evacuated equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Evacuated equipment will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2029706