Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-01-16
2007-01-16
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S493100, C378S119000
Reexamination Certificate
active
10900839
ABSTRACT:
A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprises a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, and a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site.
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Bowering Norbert
Ershov Alexander I.
Fomenkov Igor V.
Jacques Robert N.
Myers David W.
Cray William
Cymer Inc.
Nguyen Kiet T.
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