Etching of nanoscale structures on high temperature superconduct

Details Etching of nanoscale structures on high temperature superconduct Etching of nanoscale structures on high temperature superconduct

1990-10-29

1994-04-19

Hearn, Brian E.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

With material removal by etching, laser ablation, or...

505701, 505702, 505728, 427 62, 427 63, 156643, 156655, 156656, 2504922, H01L 2100

Patent

active

053045351

ABSTRACT:
A process for etching with a scanning tunneling microscope on both a single crystal and a thin film of high temperature superconductor is disclosed.

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