Etching method using noble gas halides

Details Etching method using noble gas halides Etching method using noble gas halides

1978-08-21

1980-02-26

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 204192E, 252 791, C23F 100, H01L 21306

Patent

active

041904885

ABSTRACT:
A method for etching using a noble gas halide.

REFERENCES:
patent: 3192016 (1965-06-01), Malm et al.
patent: 3377136 (1968-04-01), Morrow
patent: 3615956 (1971-10-01), Irving et al.
patent: 3975252 (1976-08-01), Fraser et al.
patent: 4028155 (1977-06-01), Jacob

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