Etching method of conductive film

Details Etching method of conductive film Etching method of conductive film

1982-12-13

1984-05-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 156664, 156667, 252 794, 252 795, C23F 102, B44C 122, C03C 1500, C03C 2506

Patent

active

044486375

ABSTRACT:
A conductive film formed on a substrate can be etched by coating an etching solution containing 0 to 30 wt % of polyhydric alcohol and tackified to a viscosity of at least 10 cps.

REFERENCES:
patent: 3483027 (1969-12-01), Ritzerfeld et al.
patent: 3647508 (1972-03-01), Gorrell
patent: 4348255 (1982-09-01), Schmidt

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