Etching method for bodies of dielectric oxide ceramic

Details Etching method for bodies of dielectric oxide ceramic Etching method for bodies of dielectric oxide ceramic

1985-09-20

1987-05-19

Lindsay, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156663, 219121LJ, B44C 122

Patent

active

046665528

ABSTRACT:
The etching of dielectric oxide ceramics and dielectric single crystal oxides, particularly perovskite ceramics, is executed by means of laser radiation in an atmosphere having a reducing effect.

REFERENCES:
patent: 3364087 (1968-01-01), Solomon et al.
patent: 3601576 (1971-08-01), Schlafli
patent: 4490211 (1984-12-01), Chen et al.
J. Addy, T. J. Chuang and F. A. Houle, IBM Technical Disclosure Bulletin, vol. 25, No. 7A, Dec., 1982.
von Gutfeld et al, App. Phys. Lett. 40(4), Feb. 15, 1982, pp. 352-354.
R. Remund, Elektronik Produktion & Pruftechnik, May, 1982, pp. 347-353.

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