Etching method and etching apparatus

Details Etching method and etching apparatus Etching method and etching apparatus

1988-12-21

1990-06-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, 156646, 20419232, 20429835, B44C 122, H01L 21306, C23F 100, C03C 1500

Patent

active

049311352

ABSTRACT:
A mounting surface of an electrode for mounting an object to be processed thereon is projected to be a curved surface identical to a curved surface obtained by deforming the object to be processed by a uniform load, and etching of the object to be processed is performed. Etching of the object to be processed can be easily and stably performed, thereby improving yield and productivity.

REFERENCES:
patent: 4615755 (1986-10-01), Tracy et al.

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