Etchants for glass films on metal substrates

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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65 31, 134 3, 156657, 156663, 252 793, 252 794, H01L 21312

Patent

active

040408973

ABSTRACT:
An aqueous solution for etching a glass layer on a metal (aluminum) substrate without substantial attack on the metal. The solution comprises buffered hydrofluoric acid, sodium chloride, and either (a) a fluorocarbon surfactant capable of forming a protective thin film upon the aluminum, or (b) a 6-hydroxy alcohol (e.g., mannitol or sorbitol).

REFERENCES:
patent: 3616098 (1971-10-01), Falls
patent: 3642549 (1972-02-01), Couture et al.
patent: 3715250 (1973-02-01), Altman et al.

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