Etchant solutions containing hydrogen fluoride and a polyammoniu

Details Etchant solutions containing hydrogen fluoride and a polyammoniu Etchant solutions containing hydrogen fluoride and a polyammoniu

1989-05-04

1990-05-01

Lacey, David L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 156662, 252 791, 252 793, 134 2, C09K 1308

Patent

active

049215728

ABSTRACT:
An aqueous etchant solution made from water, hydrogen fluoride and a polyammonium fluoride salt selected from the group consisting of ethylenediammonium difluoride and diethylenetriammonium trifluoride.

REFERENCES:
patent: 3650960 (1972-03-01), Strauss et al.
patent: 3676240 (1972-07-01), Retaijczyk
patent: 4761244 (1988-08-01), Scardera et al.
patent: 4761245 (1988-08-01), Scardera et al.
Sokhan et al., "Vapor-Liquid Equilibrium . . . Titanium-Dioxide-Water", Chemical Abstract, 100(12):92147n, 1983.
J. Judge, "A Study of the Dissolution of SiO.sub.2 in Acidic Fluoride Solution", Journal of the Electrochemical Society; Nov. 1971, pp. 1772-1775.

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