Etchant solution for photoresist-patterned metal layers

Details Etchant solution for photoresist-patterned metal layers Etchant solution for photoresist-patterned metal layers

1989-05-04

1990-01-23

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 1566591, 252 792, 252 794, C23F 100, C23F 102, B44C 122, C03C 1500

Patent

active

048956171

ABSTRACT:
An etchant solution comprised of water and:

REFERENCES:
patent: 4230522 (1980-10-01), Martin et al.
Hara et al., "Anisotropic Wet Etching of Aluminum Electrodes by an Evacuated Etching System", Journal of the Electrochemical Society; (12/85) P. 2973-2975.
Akzo Chemical Inc., Product brochure for Aromox Amine Oxides (Copyright 1982).
Product brochure for Varox 365 (Jul. 25, 1978).

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