Etchant removal apparatus and process

Details Etchant removal apparatus and process Etchant removal apparatus and process

1983-05-27

1984-10-30

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

134 10, 134 15, 134 18, 134 36, 156642, 156654, 1566591, C23F 102

Patent

active

044798490

ABSTRACT:
A method for removing excess etchant from a work piece after the work piece exits an etching chamber. The steps include sensing the presence of the work piece as it exits the chamber and subjecting the work piece to a gas liquid spray to remove excess etchant, capture the excess etchant and recycle the captured excess etchant.

REFERENCES:
patent: 3282273 (1966-11-01), Johnston et al.
patent: 3800813 (1974-04-01), Noren
patent: 3935041 (1976-01-01), Goffredo et al.
patent: 4333485 (1982-06-01), Karlsson et al.

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