Equipment innovations for nano-technology aquipment,...

Details Equipment innovations for nano-technology aquipment,... Equipment innovations for nano-technology aquipment,...

2006-01-09

2010-11-30

Cleveland, Michael (Department: 1712)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230AN, C118S7230ER, C118S728000

Reexamination Certificate

active

07842135

ABSTRACT:
Nano-technology is an emerging and intensely competitive field. There are a number of companies that work mainly in the development of various Nano-technology areas. One area that has not received too much emphasis is that of specialized equipment for Nano-technology. Nanoinstruments is a company working to rectify this deficiency in the field of nano-material deposition, especially in Carbon Nanotube and Nanowire growth. A number of innovations disclosed include the use of a low thermal mass heating unit that allows fast changes in temperature of the growth sample while providing sufficient thermal stability, uniformity and electrical isolation, a novel shower head design for providing uniform gas flow while eliminating thermal and plasma decomposition of feed stock at the nozzle, a pulsed voltage waveform that eliminates charging of substrate on which the growth has to take place, and the use of a conductive grid over insulating substrates to achieve uniform plasma over the growth surface.

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