Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2007-05-22
2007-05-22
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
Reexamination Certificate
active
10107297
ABSTRACT:
An equipment for detecting faults in semiconductor integrated circuits includes a fault input unit to input fault information for the integrated circuits formed on a semiconductor wafer, a superimposing unit to superimpose the fault information with repeating units within the surface of the semiconductor wafer, and a first characteristic factor calculation unit to calculate a first characteristic factor showing a degree to which faults are repeated every repeating unit.
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Co-pending Patent Application of: Kunihiro Mitsutake et al. Method, Apparatus, and Computer Program of Searching for Clustering Faults in Semiconductor Device Manufacturing U.S. Appl. No. 09/931,916, filed Aug. 20, 2001.
Matsushita Hiroshi
Mitsutake Kunihiro
Ushiku Yukihiro
Barlow John
Bhat Aditya
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
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