Equipment and method for processing semiconductor

Semiconductor device manufacturing: process – Miscellaneous

Reexamination Certificate

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C414S744500

Reexamination Certificate

active

07572742

ABSTRACT:
Semiconductor processing equipment includes a transfer chamber (3) having a plurality of transfer ports (33) arranged at different positions in a lateral direction. A process chamber (4A) for performing a semiconductor process to a substrate (W) to be processed is connected with the transfer chamber (3) through one of the transfer ports. A transfer arm device (5) is arranged in the transfer chamber (3) so as to transfer the substrate (W) through a plurality of the transfer ports (33). A drive mechanism (55) is arranged so as to extend and retract the transfer arm device (5) and to turn it in a vertical axis direction. Inclination adjusting mechanisms (6A-6C) are arranged so as to adjust the inclination of the transfer arm device (5).

REFERENCES:
patent: 5934856 (1999-08-01), Asakawa et al.
patent: 2005/0095111 (2005-05-01), Kim et al.
patent: 6 210066 (1994-08-01), None
patent: 10 233426 (1998-09-01), None
patent: 11 163083 (1999-06-01), None
patent: 411163083 (1999-06-01), None
patent: 11 330204 (1999-11-01), None
patent: 2001 15575 (2001-01-01), None
patent: 2002 222844 (2002-08-01), None

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