Equipment and method for processing semiconductor

Details Equipment and method for processing semiconductor Equipment and method for processing semiconductor

2005-02-24

2009-08-11

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Miscellaneous

C414S744500

Reexamination Certificate

active

07572742

ABSTRACT:
Semiconductor processing equipment includes a transfer chamber (3) having a plurality of transfer ports (33) arranged at different positions in a lateral direction. A process chamber (4A) for performing a semiconductor process to a substrate (W) to be processed is connected with the transfer chamber (3) through one of the transfer ports. A transfer arm device (5) is arranged in the transfer chamber (3) so as to transfer the substrate (W) through a plurality of the transfer ports (33). A drive mechanism (55) is arranged so as to extend and retract the transfer arm device (5) and to turn it in a vertical axis direction. Inclination adjusting mechanisms (6A-6C) are arranged so as to adjust the inclination of the transfer arm device (5).

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