Equilibration of lithium niobate crystals

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156612, 156DIG71, 156DIG87, 156DIG83, 350 9612, C30B 3108, C30B 3300, C30B 2930

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047253304

ABSTRACT:
A process is described for producing optical integrated circuits on lithium niobate substrates in which the composition of the lithium niobate substrates is adjusted by a powder bed equilibration procedure. This procedure involved exposure of the lithium niobate crystals to a powder bed in a crucible during a heat treatment. A similar procedure is used during production of optical integrated circuits to maintain the desired Li/Nb composition in the substrate.

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