Epitaxial process of forming ferrite, Fe.sub.3 O.sub.4 and .gamm

Details Epitaxial process of forming ferrite, Fe.sub.3 O.sub.4 and .gamm Epitaxial process of forming ferrite, Fe.sub.3 O.sub.4 and .gamm

1975-04-16

1976-12-07

Mack, John H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

204192, 340174TF, 360113, 360131, 427131, 428469, 156612, 156DIG74, 23DIG1, B01J 1730, B05D 512, C23C 1500

Patent

active

039960951

ABSTRACT:
A first thin film of appropriate texture, lattice constant, and crystal structure, such as body centered cubic vanadium or chromium with (110) texture is deposited upon a rigid or flexible substrate forming a plurality of polycrystals. A ferrite such as magnetite (Fe.sub.3 O.sub.4) is sputtered from a target onto the first thin film forming a mixture of .gamma.Fe.sub.2 O.sub.3 and Fe.sub.3 O.sub.4 substantially completely without formation of Fe or other oxides of iron, providing good magnetic characteristics and resistance to corrosion. The substrate temperature can be maintained as low as 200.degree.C for both steps when sputtering or evaporation is employed.

REFERENCES:
patent: 3161946 (1964-12-01), Birkenbeil
patent: 3420756 (1969-01-01), Terajima
patent: 3480922 (1969-11-01), Flur et al.
patent: 3520664 (1970-07-01), York
patent: 3691032 (1972-09-01), Luborsky et al.

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