Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1978-04-07
1983-01-11
Smith, John D.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156610, 156611, 156612, 156613, 156614, 148 15, 148175, C30B 2502, C30B 2510, C30B 2518, H01L 21205
Patent
active
043680984
ABSTRACT:
An epitaxial composite comprising a thin film of single crystal Group III-V wide band-gap compound semiconductor or semiconductor alloy on single crystal, electrically insulating oxide substrates such as sapphire, spinel, BeO, ThO.sub.2, or the like, and on III-V semiconductors or alloys. The thin film may be produced in situ on a heated substrate by reaction of an organic compound containing the Group III constituent, typically the alkyl metal organic, such as trimethylgallium and/or triethylgallium with a Group V hydride such as arsine, phosphine and/or stibine.
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Handbook of Chemistry & Physics 42nd Ed. (1961-1962) Chem. Rubber Pub. Co. pp. 2681-2697, 2700-2710.
Hamann H. Fredrick
Rockwell International Corporation
Smith John D.
Staas Harry John
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