Epitaxial composite and method of making

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156610, 156611, 156612, 156613, 156614, 148 15, 148175, C30B 2502, C30B 2510, C30B 2518, H01L 21205

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active

043680984

ABSTRACT:
An epitaxial composite comprising a thin film of single crystal Group III-V wide band-gap compound semiconductor or semiconductor alloy on single crystal, electrically insulating oxide substrates such as sapphire, spinel, BeO, ThO.sub.2, or the like, and on III-V semiconductors or alloys. The thin film may be produced in situ on a heated substrate by reaction of an organic compound containing the Group III constituent, typically the alkyl metal organic, such as trimethylgallium and/or triethylgallium with a Group V hydride such as arsine, phosphine and/or stibine.

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Handbook of Chemistry & Physics 42nd Ed. (1961-1962) Chem. Rubber Pub. Co. pp. 2681-2697, 2700-2710.

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