Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1993-07-01
1995-05-09
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250307, 250397, H01J 3704
Patent
active
054142610
ABSTRACT:
In the magnetic optical system of a transmission electron microscope (TEM), the increased strength of a second objective lens is used to increase the longitudinal energy dispersion by forming an image at a magnified second back-focal plane. The electric current distribution of other lenses in the microscope is reconfigured to compensate for any offsets introduced by the modified second objective lens. A plurality of deflectors are installed which enable the manipulation of the electron beam electronically between the specimen and the second back-focal plane. The magnified second back-focal plane is projected onto the selected-area aperture, allowing the use of the existing selected-area aperture as an objective aperture to achieve an energy filtering effect which improves the image contrast and resolution.
REFERENCES:
patent: 4194116 (1980-03-01), Egle
patent: 4434367 (1984-02-01), Yonezawa
patent: 5084618 (1992-01-01), Ito
"Design and Calibration of an IVEM for General 3-Dimensional Image of Non-Diffracting Materials", Neil Rowlands, et al., 50th Mtg of EMSA, 1992.
"Optimization of Digital Filters for the Detection of Trace Elements in Electron Energy Loss Spectroscopy II. Experiments", J. Michel, et al., Ultramicroscopy 48 (1993) 121-132, North-Holland.
"Resolution Enhancement by Deconvolution Using a Field Emission Source in Electron Energy Loss Spectroscopy", P. E. Batson, et al., Ultramicroscopy 41 (1992) 137-145 North-Holland.
"Magnetically Filtered Low-Loss Scanning Electron Microscopy", Oliver C. Wells, Ultramicroscopy 47 (1992) 101-108, North-Holland.
Ellisman Mark H.
Fan Gary G. Y.
Price Jeff
Suzuki Seiichi
Berman Jack I.
Beyer James
The Regents of the University of California
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