Energy resolved emission microscopy system and method

Television – Special applications – Manufacturing

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348 79, 348 87, 382141, H04N 718, H04N 947, G06K 900

Patent

active

056615205

ABSTRACT:
Emission microscopy software for analyzing an integrated circuit includes one or more subroutines for determining the location of an emission site based upon a powered down background image and a powered up integrated circuit image; one or more subroutines for controlling an optical dispersing apparatus and a CCD camera shutter set on the emission site to obtain photon counts therein; one or more subroutines for correcting data obtained based upon equipment sensitivities; and one or more subroutines for manipulating data relating to light intensity, wavelength, and energy, as well as relating to voltages applied to the integrated circuit.

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Applicant's Submitted Prior Art of FIG. 1 and "Description of Related Art".

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