Energy intensive surface reactions using a cluster beam

Details Energy intensive surface reactions using a cluster beam Energy intensive surface reactions using a cluster beam

1987-02-20

1988-04-26

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, 156643, 156646, 156657, 156662, 20419223, 20419237, 427 38, H01L 21306, B44C 122, C23C 1400, B05D 306

Patent

active

047402679

ABSTRACT:
Chemical reactions are accomplished at a surface of a substrate by supplying both a chemical reactant and energy by means of a cluster beam of a volatile material. Discrete units containing a volatile reactant are formed into clusters, ionized, accelerated to high energy, and impacted against the surface. The clusters disintegrate, and the reactant species reacts at the surface, under the influence of the energy transferred by the accelerated cluster. The clustered species may be the only reactant, as in a decomposition reaction, or additional reactants may be supplied from the surface or from other external sources, as in a film deposition, etching reaction, or catalysis reaction.

REFERENCES:
patent: 4411733 (1983-10-01), Macklin et al.
patent: 4457803 (1984-07-01), Takigawa
patent: 4540466 (1985-09-01), Nishizawa
patent: 4541890 (1985-09-01), Cuomo et al.
patent: 4559096 (1985-12-01), Fridman et al.

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