Energy filter with correction of a second-order chromatic aberra

Details Energy filter with correction of a second-order chromatic aberra Energy filter with correction of a second-order chromatic aberra

1994-05-20

1995-09-05

Berman, Jack I.

Radiant energy

Electron energy analysis

250396ML, H01J 4946

Patent

active

054480639

ABSTRACT:
An imaging symmetrical energy filter (of the .OMEGA.-type) comprising two pairs of sector magnets (1), (2), (3), (4) for an electron microscope. The second-order chromatic aberration is corrected by arranging the two pairs of sector magnets {(1),(4) and (2),(3)} further apart. This enables suitable arrangement of the coils to generate correction hexapole fields, so that the chromatic error is even completely eliminated. Moreover, correction of the third-order aperture aberration is also possible by constructing the hexapole coil (9) in the symmetry plane also as an octupole coil. Further correction of this third-order aberration is achieved by applying an octupole field (5) directly at the entrance of the first sector magnet (1) and an octupole field (13) directly at the exit of the fourth sector magnet (4).

REFERENCES:
patent: 4740704 (1988-04-01), Rose et al.
patent: 5177361 (1993-01-01), Krahl et al.
S. Lanio and H. Rose, "Test and improved design of a corrected imaging magnetic energy filter", Optic, vol. 73, No. 2 (1986), pp. 56-68.

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