Endpoint detection for the patterning of layered materials

Details Endpoint detection for the patterning of layered materials Endpoint detection for the patterning of layered materials

2007-10-23

2007-10-23

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Electron energy analysis

C250S306000, C250S307000, C378S089000

Reexamination Certificate

active

10904883

ABSTRACT:
Photoelectron emissions are used to detect an endpoint of a thickness alteration of a topmost layer in a set of layers undergoing patterning. The set of layers are irradiated, which causes an emission of photoelectrons. Upon receipt of or absence of a photoelectron emission, patterning endpoint is detected.

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