End effectors and methods for manufacturing end effectors...

Details End effectors and methods for manufacturing end effectors... End effectors and methods for manufacturing end effectors...

2007-03-13

2007-03-13

Hassanzadeh, Parviz (Department: 1763)

Etching a substrate: processes

Forming or treating an article whose final configuration has...

C451S056000

Reexamination Certificate

active

11036435

ABSTRACT:
End effectors, apparatuses including end effectors for conditioning planarizing pads, and methods for manufacturing end effectors with contact elements to condition planarizing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, an end effector includes a member having a first surface and a plurality of generally uniformly shaped contact elements attached to the first surface. The uniformly shaped contact elements project generally transversely from the first surface. In a further aspect of this embodiment, the uniformly shaped contact elements can be conical, frusto-conical, cylindrical, or other suitable configurations. The contact elements can also have a wear-resistant, carbon-like-diamond, silicon, and/or silicon carbide layer. Furthermore, the contact elements can have generally rounded tips.

REFERENCES:
patent: 5595527 (1997-01-01), Appel et al.
patent: 5616069 (1997-04-01), Walker et al.
patent: 5645682 (1997-07-01), Skrovan
patent: 5655951 (1997-08-01), Meikle et al.
patent: 5725417 (1998-03-01), Robinson
patent: 5779522 (1998-07-01), Walker et al.
patent: 5782675 (1998-07-01), Southwick
patent: 5801066 (1998-09-01), Meikle
patent: 5833519 (1998-11-01), Moore
patent: 5846336 (1998-12-01), Skrovan
patent: 5879226 (1999-03-01), Robinson
patent: 5910043 (1999-06-01), Manzonie et al.
patent: 5975994 (1999-11-01), Sandhu et al.
patent: 6004196 (1999-12-01), Doan et al.
patent: 6083085 (2000-07-01), Lankford
patent: 6196899 (2001-03-01), Chopra et al.
patent: 6203413 (2001-03-01), Skrovan
patent: 6220934 (2001-04-01), Sharples et al.
patent: 6238270 (2001-05-01), Robinson
patent: 6273800 (2001-08-01), Walker et al.
patent: 6284660 (2001-09-01), Doan
patent: 6306008 (2001-10-01), Moore
patent: 6331139 (2001-12-01), Walker et al.
patent: 6350691 (2002-02-01), Lankford
patent: 6352470 (2002-03-01), Elledge
patent: 6354923 (2002-03-01), Lankford
patent: 6361411 (2002-03-01), Chopra et al.
patent: 6361413 (2002-03-01), Skrovan
patent: 6368197 (2002-04-01), Elledge
patent: 6371838 (2002-04-01), Holzapfel
patent: 6439986 (2002-08-01), Myoung et al.
patent: 6500054 (2002-12-01), Ma et al.
patent: 6672945 (2004-01-01), Matsuo et al.
patent: 6852016 (2005-02-01), Henderson
patent: 6872127 (2005-03-01), Lin et al.
patent: 2003/0060130 (2003-03-01), Kramer
patent: 2003/0109204 (2003-06-01), Sung
patent: 2006/0025056 (2006-02-01), Henderson

Affiliated with

Also associated with

Rating

End effectors and methods for manufacturing end effectors... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with End effectors and methods for manufacturing end effectors..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and End effectors and methods for manufacturing end effectors... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3755306