End-block for a rotatable target sputtering apparatus

Details End-block for a rotatable target sputtering apparatus End-block for a rotatable target sputtering apparatus

2005-10-11

2010-11-02

McDonald, Rodney G (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298220

Reexamination Certificate

active

07824528

ABSTRACT:
An end-block for electrically energising a rotatable tubular target in a vacuum coating installation is disclosed. The end-block has a rotary electrical contact that reduces the joule heating effects when operating in alternating current mode. When compared to known end-blocks, this is achieved by increasing the number of contact areas between a contacting ring and a series of circumferentially mounted contacting shoes. Also the contact shoes are being pressed radially outwardly by means of resilient elements against the contacting ring.

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patent: 2004/0140208 (2004-07-01), German et al.
patent: 1 355 343 (2003-10-01), None

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