Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent
1993-10-29
1996-07-23
Werner, Frank E.
Material or article handling
Apparatus for moving intersupporting articles into, within,...
Stack forming apparatus
414217, 414416, 414937, 414939, 414490, 20429825, 118719, B65B 104
Patent
active
055383904
ABSTRACT:
A load lock interface for a semiconductor wafer process chamber includes a platform adapted to receive and engage with a carrier containing a cassette of semiconductor wafers; and a removable bell-shaped enclosure adapted to surround and seal said carrier from the ambient environment while the carrier is engaged with the load lock interface platform. Once engaged with the carrier, the platform is operable to withdraw the cassette of wafers from the carrier and position the cassette within a load lock. Thereafter, the cassette may be indexed and individual wafers may be removed from the cassette for processing within the process chamber.
REFERENCES:
patent: 4523970 (1985-08-01), Tullis
patent: 4534389 (1985-08-01), Tullis
patent: 4582219 (1986-04-01), Mortensen
patent: 4668478 (1987-05-01), Homer
patent: 4705444 (1987-11-01), Tullis
patent: 4709834 (1987-12-01), Mortensen
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4781511 (1988-11-01), Harada et al.
patent: 4826360 (1989-05-01), Iwasawa
patent: 4990047 (1991-02-01), Wagner
patent: 4995430 (1991-02-01), Bonora
patent: 5044871 (1991-09-01), Davis
patent: 5058526 (1991-10-01), Matsushita
patent: 5092728 (1992-03-01), Crabb
patent: 5112277 (1992-05-01), Cruz
patent: 5226781 (1993-07-01), Glachet et al.
patent: 5370491 (1994-12-01), Bonora et al.
patent: 5391035 (1995-02-01), Krueger
patent: 5433574 (1995-07-01), Kawano et al.
Applied Materials Inc.
Glenn Michael A.
Werner Frank E.
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