Encapsulated and water cooled electromagnet array

Details Encapsulated and water cooled electromagnet array Encapsulated and water cooled electromagnet array

2006-12-13

2010-12-07

Ngueyn, Nam X (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C118S620000, C118S621000, C118S7230AN, C204S298010, C204S298310, C156S345100

Reexamination Certificate

active

07846310

ABSTRACT:
A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.

REFERENCES:
patent: 4894510 (1990-01-01), Nakanishi et al.
patent: 5985092 (1999-11-01), Chiu et al.
patent: 2005/0263390 (2005-12-01), Gung et al.

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