Emergency machine off feature with safety control interface

Details Emergency machine off feature with safety control interface Emergency machine off feature with safety control interface

2007-09-12

2010-12-07

Lieu, Julie (Department: 2612)

Communications: electrical

Condition responsive indicating system

With particular coupling link

C340S635000, C340S506000, C307S125000, C307S139000, C219S507000, C219S509000

Reexamination Certificate

active

07847683

ABSTRACT:
An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.

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