Embedded inductor and method of making

Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil

Reexamination Certificate

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C336S223000, C336S232000

Reexamination Certificate

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06975199

ABSTRACT:
A dielectric substrate having an embedded inductor wherein each turn of the inductor traverses several layers such that the top and bottom of each turn of the inductor are parallel to each other but are in different layers and the sides of each turn of the inductor traverse at least one layer to connect the top and bottom of the inductor.

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IBM Technical Disclosure Bulletin, vol. 29, No. 2, Jul. 1986 entitled, “Method Of Fabricating Deflection Coils For Electron Lithography Systems”.

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