Embedded absorber X-ray mask and method for making same

Details Embedded absorber X-ray mask and method for making same Embedded absorber X-ray mask and method for making same

1980-02-07

1985-08-20

Schilling, Richard L.

X-ray or gamma ray systems or devices

Specific application

Lithography

427160, 427258, 427264, 427270, 2505051, 2505151, 430 5, G21C 1100, G02B 500, G03F 1100, B05B 500

Patent

active

045368821

ABSTRACT:
A mask which is especially useful in X-ray lithography wherein the X-ray absorber material is embedded in the mask membrane.

REFERENCES:
patent: 3742230 (1973-06-01), Spears et al.
patent: 3892973 (1975-07-01), Coquin et al.
patent: 4037111 (1977-07-01), Coquin et al.

Affiliated with

Also associated with

Rating

Embedded absorber X-ray mask and method for making same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Embedded absorber X-ray mask and method for making same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Embedded absorber X-ray mask and method for making same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-564562