Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2005-08-23
2005-08-23
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
06934024
ABSTRACT:
A solid immersion tunneling ellipsometer and methods relating thereto may include a solid immersion apparatus (e.g., a prism or an objective lens in combination with a solid immersion lens) that facilitates optical tunneling and provide information that can be used in the determination of one or more characteristics (e.g., thickness, index of refraction, etc.) of samples (e.g., thin films, ultrathin films, etc.).
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Leger James R.
Zhan Qiwen
Mueting Raasch & Gebhardt, P.A.
Regents of the University of Minnesota
Stafira Michael P.
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