Ellipsometric method and control device for making a...

Details Ellipsometric method and control device for making a... Ellipsometric method and control device for making a...

2005-07-05

2005-07-05

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

06914675

ABSTRACT:
A method for controlling the production of an object controlled by a gas panel, by performing an ellipsometric measurement on the object represented by its Mueller matrix; controlling, with a gas panel, the manufacture on the basis of the ellipsometric measurement. Certain parameters of the Mueller matrix are determined in advance, for characterizing the manufacture, and only these parameters are extracted from the ellipsometric measurement during manufacture, the parameters being two different parameters of the ellipsometric angles ψ and Δ and trigonometric functions thereof.

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