Ellipsometric investigation of thin films

Details Ellipsometric investigation of thin films Ellipsometric investigation of thin films

2007-03-20

2007-03-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

10765732

ABSTRACT:
Use of differences in spectroscopic spectra resulting from multiple sample investigation, or sequential investigation of the same sample in evaluation of sample characterizing parameters such as ultra-thin film thickness.

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