Ellipsometer using an expanded beam

Details Ellipsometer using an expanded beam Ellipsometer using an expanded beam

1992-11-19

1999-06-08

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

G01J 404

Patent

active

059108410

ABSTRACT:
An ellipsometer using an expanded beam for measuring characteristic of a sample comprising a beam expander disposed in an incident light beam for expanding the incident light beam, the expanded light beam being reflected from the sample, a condenser lens disposed in the expanded and reflected light beam for condensing the expanded and reflected light beam into a light beam having a cross section, and a photo sensor for receiving the light beam, the cross section of the light beam having a sufficient area for the photo sensor to form a two-dimentional image from the light beam from the condenser lens, whereby the measurement of the elliptically polarized state can be measured at high speed.

REFERENCES:
patent: 3992571 (1976-11-01), Garlick et al.
patent: 4516855 (1985-05-01), Korth
patent: 4724479 (1988-02-01), Schmalfuss et al.
patent: 5076696 (1991-12-01), Cohn et al.

Affiliated with

Also associated with

Rating

Ellipsometer using an expanded beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ellipsometer using an expanded beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ellipsometer using an expanded beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1685928